class kqcircuits.test_structures.cross_test.CrossTest[source]

Bases: TestStructure

PCell declaration for optical lithography test alignment cross markers.

Contains a given number of alignment cross markers in base_metal_gap_wo_grid-layer with given width, length and



Child classes re-define this method to build the PCell.

PCell parameters:

  • num_crosses (Int) - Number of crosses, default=10

  • cross_width (Double) - Width of the crosses arms, default=4, unit=μm

  • cross_length (Double) - Length of the crosses, default=15, unit=μm

  • cross_spacing (Double) - Spacing between the crosses, default=100, unit=μm

  • cross_box_distance (Double) - Distance between crosses and respective boxes, default=4, unit=μm