kqcircuits.chips.tsv_test
- class kqcircuits.chips.tsv_test.TsvTest[source]
Bases:
Chip
Through silicon via test chip.
Consists of arrays of TSVs and metrology segment for crossectional analysis.
array_layout (List) - Array layout for TSV in center, default=
[2, 2, 2, 6, 14, 2, 14, 14, 2, 2, 14, 14, 2, 14, 6, 2, 2, 2]
metrology_pitch (Double) - Pitch in the metrology, default=
50
, unit=μm
cpw_distance (Double) - CPW Placeholder distance, default=
100
, unit=μm
hor_distance (Double) - Horizontal pitch on TSV, default=
200
, unit=μm
ver_distance (Double) - Vertical pitch on TSV, default=
500
, unit=μm
a (Double) - Width of center conductor, default=
10
, unit=μm
b (Double) - Width of gap, default=
6
, unit=μm
n (Int) - Number of points on turns, default=
64
r (Double) - Turn radius, default=
100
, unit=μm
margin (Double) - Margin of the protection layer, default=
5
, unit=μm
face_ids (List) - Chip face IDs list, default=
['1t1', '2b1', '1b1', '2t1']
display_name (String) - Name displayed in GUI (empty for default), default=
protect_opposite_face (Boolean) - This applies only on signal carrying elements that typically include some metal between gaps., default=
False
opposing_face_id_groups (List) - Opposing face ID groups (list of lists), default=
[['1t1', '2b1']]
etch_opposite_face (Boolean) - Etch avoidance shaped gap on the opposite face too, default=
False
etch_opposite_face_margin (Double) - Margin of the opposite face etch shape, default=
5
, unit=μm
_epr_show (Boolean) - Show geometry related to EPR simulation, if available, default=
False
_epr_cross_section_cut_layer (Layer) - Layer where EPR cross section cuts are placed, default=
None
_epr_cross_section_cut_width (Double) - Width of the EPR cross section cuts when visualised, default=
0.0
tsv_type (String) - TSV type, default=
Tsv Standard
, choices=['Tsv Standard', 'Tsv Ellipse']
tsv_diameter (Double) - TSV diameter, default=
10
, unit=μm
tsv_margin (Double) - TSV margin, default=
30
, unit=μm
tsv_elliptical_width (Double) - TSV elliptical width, default=
10
, unit=μm