# This code is part of KQCircuits
# Copyright (C) 2021 IQM Finland Oy
#
# This program is free software: you can redistribute it and/or modify it under the terms of the GNU General Public
# License as published by the Free Software Foundation, either version 3 of the License, or (at your option) any later
# version.
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# warranty of MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the GNU General Public License for more details.
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# https://www.gnu.org/licenses/gpl-3.0.html.
#
# The software distribution should follow IQM trademark policy for open-source software
# (meetiqm.com/iqm-open-source-trademark-policy). IQM welcomes contributions to the code.
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from kqcircuits.pya_resolver import pya
from kqcircuits.chips.chip import Chip
from kqcircuits.test_structures.tsv_test_pattern import TsvTestPattern
from kqcircuits.elements.tsvs.tsv import Tsv
from kqcircuits.util.parameters import Param, pdt, add_parameters_from
from kqcircuits.elements.tsvs.tsv_ellipse import TsvEllipse
[docs]
@add_parameters_from(TsvEllipse, "*", tsv_diameter=10)
class TsvTest(Chip):
"""Through silicon via test chip.
Consists of arrays of TSVs and metrology segment for crossectional analysis.
"""
array_layout = Param(
pdt.TypeList, "Array layout for TSV in center", [2, 2, 2, 6, 14, 2, 14, 14, 2, 2, 14, 14, 2, 14, 6, 2, 2, 2]
)
metrology_pitch = Param(pdt.TypeDouble, "Pitch in the metrology", 50, unit="μm")
cpw_distance = Param(pdt.TypeDouble, "CPW Placeholder distance", 100, unit="μm")
hor_distance = Param(pdt.TypeDouble, "Horizontal pitch on TSV", 200, unit="μm")
ver_distance = Param(pdt.TypeDouble, "Vertical pitch on TSV", 500, unit="μm")
[docs]
def build(self):
# create cell pattern in the center
cell_pattern = self.add_element(TsvTestPattern, tsv_array_form=self.array_layout)
self.insert_cell(cell_pattern, pya.DCplxTrans(1, 0, False, 5000, 5000))
# metrology cell for crossectional analysis
min_spacing = (
self.tsv_diameter if self.tsv_type == "standard" else max([self.tsv_diameter, self.tsv_elliptical_width])
)
self.create_xsection(
position=pya.DPoint(1250, 1250), array_form=[10, 10], pitch=self.metrology_pitch + min_spacing
)
self.create_xsection(
position=pya.DPoint(1250, 8750), array_form=[8, 8], pitch=self.metrology_pitch + 2 * min_spacing
)
self.create_xsection(
position=pya.DPoint(8750, 1250), array_form=[6, 6], pitch=self.metrology_pitch + 2.5 * min_spacing
)
[docs]
def create_xsection(self, position, array_form, pitch):
tsv_unit = self.add_element(Tsv)
for i in range(array_form[0]):
for j in range(array_form[1]):
x_position = (i - array_form[0] / 2) * pitch + position.x
y_position = (j - array_form[0] / 2) * pitch + position.y
self.insert_cell(tsv_unit, pya.DCplxTrans(1, 0, False, x_position, y_position))