Source code for kqcircuits.chips.tsv_test

# This code is part of KQCircuits
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from kqcircuits.pya_resolver import pya
from kqcircuits.chips.chip import Chip
from kqcircuits.test_structures.tsv_test_pattern import TsvTestPattern
from kqcircuits.elements.tsvs.tsv import Tsv
from kqcircuits.util.parameters import Param, pdt, add_parameters_from
from kqcircuits.elements.tsvs.tsv_ellipse import TsvEllipse


[docs]@add_parameters_from(TsvEllipse, "*", tsv_diameter=10) class TsvTest(Chip): """Through silicon via test chip. Consists of arrays of TSVs and metrology segment for crossectional analysis. """ array_layout = Param( pdt.TypeList, "Array layout for TSV in center", [2, 2, 2, 6, 14, 2, 14, 14, 2, 2, 14, 14, 2, 14, 6, 2, 2, 2] ) metrology_pitch = Param(pdt.TypeDouble, "Pitch in the metrology", 50, unit="μm") cpw_distance = Param(pdt.TypeDouble, "CPW Placeholder distance", 100, unit="μm") hor_distance = Param(pdt.TypeDouble, "Horizontal pitch on TSV", 200, unit="μm") ver_distance = Param(pdt.TypeDouble, "Vertical pitch on TSV", 500, unit="μm")
[docs] def build(self): # create cell pattern in the center cell_pattern = self.add_element(TsvTestPattern, tsv_array_form=self.array_layout) self.insert_cell(cell_pattern, pya.DCplxTrans(1, 0, False, 5000, 5000)) # metrology cell for crossectional analysis min_spacing = ( self.tsv_diameter if self.tsv_type == "standard" else max([self.tsv_diameter, self.tsv_elliptical_width]) ) self.create_xsection( position=pya.DPoint(1250, 1250), array_form=[10, 10], pitch=self.metrology_pitch + min_spacing ) self.create_xsection( position=pya.DPoint(1250, 8750), array_form=[8, 8], pitch=self.metrology_pitch + 2 * min_spacing ) self.create_xsection( position=pya.DPoint(8750, 1250), array_form=[6, 6], pitch=self.metrology_pitch + 2.5 * min_spacing )
[docs] def create_xsection(self, position, array_form, pitch): tsv_unit = self.add_element(Tsv) for i in range(array_form[0]): for j in range(array_form[1]): x_position = (i - array_form[0] / 2) * pitch + position.x y_position = (j - array_form[0] / 2) * pitch + position.y self.insert_cell(tsv_unit, pya.DCplxTrans(1, 0, False, x_position, y_position))