Source code for kqcircuits.test_structures.cross_test

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from kqcircuits.pya_resolver import pya
from kqcircuits.util.parameters import Param, pdt

from kqcircuits.test_structures.test_structure import TestStructure

[docs]class CrossTest(TestStructure): """PCell declaration for optical lithography test alignment cross markers. Contains a given number of alignment cross markers in `base_metal_gap_wo_grid`-layer with given width, length and spacing. """ num_crosses = Param(pdt.TypeInt, "Number of crosses", 10) cross_width = Param(pdt.TypeDouble, "Width of the crosses arms", 4, unit="μm") cross_length = Param(pdt.TypeDouble, "Length of the crosses", 15, unit="μm") cross_spacing = Param(pdt.TypeDouble, "Spacing between the crosses", 100, unit="μm") cross_box_distance = Param(pdt.TypeDouble, "Distance between crosses and respective boxes", 4, unit="μm")
[docs] def build(self): layer_base_metal = self.get_layer("base_metal_gap_wo_grid") box = pya.DBox(pya.DPoint(-self.cross_width/2, -self.cross_box_distance), pya.DPoint(self.cross_width/2, -self.cross_box_distance - self.cross_width)) vertical_tick = pya.DBox(pya.DPoint(-self.cross_width/2, 0), pya.DPoint(self.cross_width/2, self.cross_length)) horizontal_tick = pya.DBox(pya.DPoint(-self.cross_length/2, self.cross_length/2 - self.cross_width/2), pya.DPoint(self.cross_length/2, self.cross_length/2 + self.cross_width/2)) for i in range(self.num_crosses): trans = pya.DTrans(0, False, i*self.cross_spacing, 0).to_itype(self.layout.dbu) box_trans = pya.Region(trans * box.to_itype(self.layout.dbu)) vertical_tick_trans = pya.Region(trans * vertical_tick.to_itype(self.layout.dbu)) horizontal_tick_trans = pya.Region(trans * horizontal_tick.to_itype(self.layout.dbu)) marker = box_trans + vertical_tick_trans + horizontal_tick_trans self.cell.shapes(layer_base_metal).insert(marker)