# This code is part of KQCircuits
# Copyright (C) 2022 IQM Finland Oy
#
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from kqcircuits.pya_resolver import pya
from kqcircuits.util.parameters import Param, pdt
from kqcircuits.test_structures.test_structure import TestStructure
[docs]
class CrossTest(TestStructure):
"""PCell declaration for optical lithography test alignment cross markers.
Contains a given number of alignment cross markers in `base_metal_gap_wo_grid`-layer with given width, length and
spacing.
"""
num_crosses = Param(pdt.TypeInt, "Number of crosses", 10)
cross_width = Param(pdt.TypeDouble, "Width of the crosses arms", 4, unit="μm")
cross_length = Param(pdt.TypeDouble, "Length of the crosses", 15, unit="μm")
cross_spacing = Param(pdt.TypeDouble, "Spacing between the crosses", 100, unit="μm")
cross_box_distance = Param(pdt.TypeDouble, "Distance between crosses and respective boxes", 4, unit="μm")
[docs]
def build(self):
layer_base_metal = self.get_layer("base_metal_gap_wo_grid")
box = pya.DBox(
pya.DPoint(-self.cross_width / 2, -self.cross_box_distance),
pya.DPoint(self.cross_width / 2, -self.cross_box_distance - self.cross_width),
)
vertical_tick = pya.DBox(
pya.DPoint(-self.cross_width / 2, 0), pya.DPoint(self.cross_width / 2, self.cross_length)
)
horizontal_tick = pya.DBox(
pya.DPoint(-self.cross_length / 2, self.cross_length / 2 - self.cross_width / 2),
pya.DPoint(self.cross_length / 2, self.cross_length / 2 + self.cross_width / 2),
)
for i in range(self.num_crosses):
trans = pya.DTrans(0, False, i * self.cross_spacing, 0).to_itype(self.layout.dbu)
box_trans = pya.Region(trans * box.to_itype(self.layout.dbu))
vertical_tick_trans = pya.Region(trans * vertical_tick.to_itype(self.layout.dbu))
horizontal_tick_trans = pya.Region(trans * horizontal_tick.to_itype(self.layout.dbu))
marker = box_trans + vertical_tick_trans + horizontal_tick_trans
self.cell.shapes(layer_base_metal).insert(marker)