# This code is part of KQCircuits
# Copyright (C) 2023 IQM Finland Oy
#
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from kqcircuits.pya_resolver import pya
from kqcircuits.util.parameters import Param, pdt
from kqcircuits.test_structures.test_structure import TestStructure
[docs]
class StripesTestIncreasingWidth(TestStructure):
"""PCell declaration for optical lithography test stripes.
Contains a given number of lines in `base_metal_gap_wo_grid`-layer with given length and spacing, and increasing
width. There is also a text in `base_metal_gap_wo_grid`-layer next to the lines, which shows the line width.
"""
num_stripes = Param(pdt.TypeInt, "Number of stripes", 20)
min_stripe_width = Param(pdt.TypeDouble, "Beginning width of the stripe sequence", 1, unit="μm")
stripe_step = Param(pdt.TypeDouble, "Stripe widening increment in the stripe sequence", 1, unit="μm")
stripe_length = Param(pdt.TypeDouble, "Length of the stripes", 100, unit="μm")
stripe_spacing = Param(pdt.TypeDouble, "Spacing between the stripes", 1, unit="μm")
[docs]
def build(self):
layer_base_metal = self.get_layer("base_metal_gap_wo_grid")
width = float(self.min_stripe_width)
loc = 0
for _ in range(self.num_stripes):
stripe = pya.DBox(0, 0, width, self.stripe_length)
trans = pya.DTrans(loc, 0)
self.cell.shapes(layer_base_metal).insert(trans * stripe)
loc += width + self.stripe_spacing
width += float(self.stripe_step)
spacing_str = int(self.stripe_spacing)
text_cell = self.layout.create_cell(
"TEXT",
"Basic",
{
"layer": self.face()["base_metal_gap_wo_grid"],
"text": f"{spacing_str}",
"mag": 40,
},
)
text_x = float(loc + self.min_stripe_width)
text_y = self.stripe_length / 2
self.insert_cell(text_cell, pya.DTrans(text_x, text_y))