# This code is part of KQCircuits
# Copyright (C) 2021 IQM Finland Oy
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import numpy
from kqcircuits.pya_resolver import pya
from kqcircuits.chips.chip import Chip
from kqcircuits.test_structures.stripes_test import StripesTest
from kqcircuits.test_structures.cross_test import CrossTest
[docs]class LithographyTest(Chip):
"""Optical lithography test chip.
Consists of StripesTest cells with different parameters.
"""
[docs] def build(self):
cell_horizontal_1, cell_vertical_1, cell_diagonal_1 = self.create_pattern(num_stripes=20, length=100,
min_width=1,
max_width=15, step=1, spacing=1,
face_id=self.face_ids[0])
cell_horizontal_2, cell_vertical_2, cell_diagonal_2 = self.create_pattern(num_stripes=20, length=100,
min_width=1,
max_width=15, step=1, spacing=5,
face_id=self.face_ids[0])
self.insert_cell(cell_horizontal_1, pya.DCplxTrans(1, 0, False, 2000, 6500))
self.insert_cell(cell_horizontal_1, pya.DCplxTrans(1, 0, False, 3000, 6500))
self.insert_cell(cell_horizontal_2, pya.DCplxTrans(1, 0, False, 4000, 6500))
self.insert_cell(cell_horizontal_2, pya.DCplxTrans(1, 0, False, 6000, 6500))
self.insert_cell(cell_vertical_1, pya.DCplxTrans(1, 0, False, 1500, 5700))
self.insert_cell(cell_vertical_1, pya.DCplxTrans(1, 0, False, 5500, 5700))
self.insert_cell(cell_vertical_2, pya.DCplxTrans(1, 0, False, 1500, 3800))
self.insert_cell(cell_vertical_2, pya.DCplxTrans(1, 0, False, 5500, 3800))
self.insert_cell(cell_diagonal_1, pya.DCplxTrans(1, 0, False, 400, 1500))
self.insert_cell(cell_diagonal_1, pya.DCplxTrans(1, 0, False, 1500, 1500))
self.insert_cell(cell_diagonal_2, pya.DCplxTrans(1, 0, False, 3100, 1500))
self.insert_cell(cell_diagonal_2, pya.DCplxTrans(1, 0, False, 6100, 1500))
[docs] def create_pattern(self, num_stripes, length, min_width, max_width, step, spacing, face_id):
first_stripes_width = 2 * num_stripes * min_width
cell_horizontal = self.layout.create_cell("Stripes")
cell_vertical = self.layout.create_cell("Stripes")
cell_diagonal = self.layout.create_cell("Stripes")
for i, width in enumerate(numpy.arange(min_width, max_width + 0.1 * step, step)):
stripes_cell = self.add_element(StripesTest, num_stripes=num_stripes, stripe_width=width,
stripe_length=length, stripe_spacing=spacing * width, face_ids=[face_id])
# calculate the number of cross alignment marker
if (num_stripes*(width + spacing * width) - spacing * width - 45) % 100 < 50:
num_crosses = (num_stripes * (width + spacing * width) - spacing * width - 45)//100 + 1
else:
num_crosses = (num_stripes * (width + spacing * width) - spacing * width - 45)//100 + 2
cross_cell = self.add_element(CrossTest, num_crosses=int(num_crosses), cross_spacing=100,
face_ids=[face_id])
# horizontal
cell_horizontal.insert(pya.DCellInstArray(stripes_cell.cell_index(),
pya.DCplxTrans(1, 0, False, 0, 2 * i * length +
first_stripes_width)))
cell_horizontal.insert(pya.DCellInstArray(cross_cell.cell_index(),
pya.DCplxTrans(1, 0, False, 45, 2 * i * length +
first_stripes_width - CrossTest.cross_length*5/2)))
# vertical
cell_vertical.insert(pya.DCellInstArray(stripes_cell.cell_index(),
pya.DCplxTrans(1, 90, False, 2 * i * length + length +
first_stripes_width, 0)))
cell_vertical.insert(pya.DCellInstArray(cross_cell.cell_index(),
pya.DCplxTrans(1, 90, True, 2 * i * length + length +
first_stripes_width - length - CrossTest.cross_length*5/2, +45)))
# diagonal
diag_offset = 0 # 2*num_stripes*width/numpy.sqrt(8)
cell_diagonal.insert(pya.DCellInstArray(stripes_cell.cell_index(),
pya.DCplxTrans(1, -45, False, 500 + i * length - diag_offset,
500 + i * length + diag_offset)))
return cell_horizontal, cell_vertical, cell_diagonal