# This code is part of KQCircuits
# Copyright (C) 2021 IQM Finland Oy
#
# This program is free software: you can redistribute it and/or modify it under the terms of the GNU General Public
# License as published by the Free Software Foundation, either version 3 of the License, or (at your option) any later
# version.
#
# This program is distributed in the hope that it will be useful, but WITHOUT ANY WARRANTY; without even the implied
# warranty of MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the GNU General Public License for more details.
#
# You should have received a copy of the GNU General Public License along with this program. If not, see
# https://www.gnu.org/licenses/gpl-3.0.html.
#
# The software distribution should follow IQM trademark policy for open-source software
# (meetiqm.com/developers/osstmpolicy). IQM welcomes contributions to the code. Please see our contribution agreements
# for individuals (meetiqm.com/developers/clas/individual) and organizations (meetiqm.com/developers/clas/organization).
import numpy
from kqcircuits.pya_resolver import pya
from kqcircuits.chips.chip import Chip
from kqcircuits.test_structures.stripes_test import StripesTest
from kqcircuits.test_structures.stripes_test_increasing_width import StripesTestIncreasingWidth
from kqcircuits.test_structures.cross_test import CrossTest
from kqcircuits.util.parameters import Param, pdt
[docs]
class LithographyTest(Chip):
"""Optical lithography test chip.
Consists of StripesTest cells with different parameters.
"""
stripe_test = Param(
pdt.TypeString, "stripe test type", "stripe_test", choices=["stripe_test", "stripe_test_increasing_width"]
)
[docs]
def build(self):
cell_horizontal_1, cell_vertical_1, cell_diagonal_1 = self.create_pattern(
num_stripes=20, length=100, min_width=1, max_width=15, step=1, spacing=1, face_id=self.face_ids[0]
)
cell_horizontal_2, cell_vertical_2, cell_diagonal_2 = self.create_pattern(
num_stripes=20, length=100, min_width=1, max_width=15, step=1, spacing=5, face_id=self.face_ids[0]
)
self.insert_cell(cell_horizontal_1, pya.DCplxTrans(1, 0, False, 2000, 6500))
self.insert_cell(cell_horizontal_1, pya.DCplxTrans(1, 0, False, 3000, 6500))
self.insert_cell(cell_horizontal_2, pya.DCplxTrans(1, 0, False, 4000, 6500))
self.insert_cell(cell_horizontal_2, pya.DCplxTrans(1, 0, False, 6000, 6500))
self.insert_cell(cell_vertical_1, pya.DCplxTrans(1, 0, False, 1500, 5700))
self.insert_cell(cell_vertical_1, pya.DCplxTrans(1, 0, False, 5500, 5700))
self.insert_cell(cell_vertical_2, pya.DCplxTrans(1, 0, False, 1500, 3800))
self.insert_cell(cell_vertical_2, pya.DCplxTrans(1, 0, False, 5500, 3800))
self.insert_cell(cell_diagonal_1, pya.DCplxTrans(1, 0, False, 400, 1500))
self.insert_cell(cell_diagonal_1, pya.DCplxTrans(1, 0, False, 1500, 1500))
self.insert_cell(cell_diagonal_2, pya.DCplxTrans(1, 0, False, 3100, 1500))
self.insert_cell(cell_diagonal_2, pya.DCplxTrans(1, 0, False, 6100, 1500))
[docs]
def create_pattern(self, num_stripes, length, min_width, max_width, step, spacing, face_id):
first_stripes_width = 2 * num_stripes * min_width
cell_horizontal = self.layout.create_cell("Stripes")
cell_vertical = self.layout.create_cell("Stripes")
cell_diagonal = self.layout.create_cell("Stripes")
for i, width in enumerate(numpy.arange(min_width, max_width + 0.1 * step, step)):
n_stripes = num_stripes
if self.stripe_test == "stripe_test":
stripes_cell = self.add_element(
StripesTest,
num_stripes=n_stripes,
stripe_width=width,
stripe_length=length,
stripe_spacing=spacing * width,
face_ids=[face_id],
)
stripe_row_width = n_stripes * (width + spacing * width) - spacing * width
elif self.stripe_test == "stripe_test_increasing_width":
n_stripes = int(num_stripes * 0.4)
stripes_cell = self.add_element(
StripesTestIncreasingWidth,
num_stripes=n_stripes,
min_stripe_width=width,
stripe_step=width,
stripe_length=length,
stripe_spacing=spacing * width,
face_ids=[face_id],
)
stripe_row_width = sum([spacing * width + (i + 1) * width for i in range(n_stripes)])
# calculate the number of cross alignment marker
if (stripe_row_width - 45) % 100 < 50:
num_crosses = (stripe_row_width - 45) // 100 + 1
else:
num_crosses = (stripe_row_width - 45) // 100 + 2
cross_cell = self.add_element(
CrossTest, num_crosses=int(num_crosses), cross_spacing=100, face_ids=[face_id]
)
# horizontal
cell_horizontal.insert(
pya.DCellInstArray(
stripes_cell.cell_index(), pya.DCplxTrans(1, 0, False, 0, 2 * i * length + first_stripes_width)
)
)
cell_horizontal.insert(
pya.DCellInstArray(
cross_cell.cell_index(),
pya.DCplxTrans(
1, 0, False, 45, 2 * i * length + first_stripes_width - CrossTest.cross_length * 5 / 2
),
)
)
# vertical
cell_vertical.insert(
pya.DCellInstArray(
stripes_cell.cell_index(),
pya.DCplxTrans(1, 90, False, 2 * i * length + length + first_stripes_width, 0),
)
)
cell_vertical.insert(
pya.DCellInstArray(
cross_cell.cell_index(),
pya.DCplxTrans(
1,
90,
True,
2 * i * length + length + first_stripes_width - length - CrossTest.cross_length * 5 / 2,
+45,
),
)
)
# diagonal
diag_offset = 0 # 2*num_stripes*width/numpy.sqrt(8)
cell_diagonal.insert(
pya.DCellInstArray(
stripes_cell.cell_index(),
pya.DCplxTrans(1, -45, False, 500 + i * length - diag_offset, 500 + i * length + diag_offset),
)
)
return cell_horizontal, cell_vertical, cell_diagonal