Source code for kqcircuits.chips.lithography_test

# This code is part of KQCircuits
# Copyright (C) 2021 IQM Finland Oy
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import numpy

from kqcircuits.pya_resolver import pya

from kqcircuits.chips.chip import Chip
from kqcircuits.test_structures.stripes_test import StripesTest
from kqcircuits.test_structures.cross_test import CrossTest


[docs]class LithographyTest(Chip): """Optical lithography test chip. Consists of StripesTest cells with different parameters. """
[docs] def build(self): cell_horizontal_1, cell_vertical_1, cell_diagonal_1 = self.create_pattern(num_stripes=20, length=100, min_width=1, max_width=15, step=1, spacing=1, face_id=self.face_ids[0]) cell_horizontal_2, cell_vertical_2, cell_diagonal_2 = self.create_pattern(num_stripes=20, length=100, min_width=1, max_width=15, step=1, spacing=5, face_id=self.face_ids[0]) self.insert_cell(cell_horizontal_1, pya.DCplxTrans(1, 0, False, 2000, 6500)) self.insert_cell(cell_horizontal_1, pya.DCplxTrans(1, 0, False, 3000, 6500)) self.insert_cell(cell_horizontal_2, pya.DCplxTrans(1, 0, False, 4000, 6500)) self.insert_cell(cell_horizontal_2, pya.DCplxTrans(1, 0, False, 6000, 6500)) self.insert_cell(cell_vertical_1, pya.DCplxTrans(1, 0, False, 1500, 5700)) self.insert_cell(cell_vertical_1, pya.DCplxTrans(1, 0, False, 5500, 5700)) self.insert_cell(cell_vertical_2, pya.DCplxTrans(1, 0, False, 1500, 3800)) self.insert_cell(cell_vertical_2, pya.DCplxTrans(1, 0, False, 5500, 3800)) self.insert_cell(cell_diagonal_1, pya.DCplxTrans(1, 0, False, 400, 1500)) self.insert_cell(cell_diagonal_1, pya.DCplxTrans(1, 0, False, 1500, 1500)) self.insert_cell(cell_diagonal_2, pya.DCplxTrans(1, 0, False, 3100, 1500)) self.insert_cell(cell_diagonal_2, pya.DCplxTrans(1, 0, False, 6100, 1500))
[docs] def create_pattern(self, num_stripes, length, min_width, max_width, step, spacing, face_id): first_stripes_width = 2 * num_stripes * min_width cell_horizontal = self.layout.create_cell("Stripes") cell_vertical = self.layout.create_cell("Stripes") cell_diagonal = self.layout.create_cell("Stripes") for i, width in enumerate(numpy.arange(min_width, max_width + 0.1 * step, step)): stripes_cell = self.add_element(StripesTest, num_stripes=num_stripes, stripe_width=width, stripe_length=length, stripe_spacing=spacing * width, face_ids=[face_id]) # calculate the number of cross alignment marker if (num_stripes*(width + spacing * width) - spacing * width - 45) % 100 < 50: num_crosses = (num_stripes * (width + spacing * width) - spacing * width - 45)//100 + 1 else: num_crosses = (num_stripes * (width + spacing * width) - spacing * width - 45)//100 + 2 cross_cell = self.add_element(CrossTest, num_crosses=int(num_crosses), cross_spacing=100, face_ids=[face_id]) # horizontal cell_horizontal.insert(pya.DCellInstArray(stripes_cell.cell_index(), pya.DCplxTrans(1, 0, False, 0, 2 * i * length + first_stripes_width))) cell_horizontal.insert(pya.DCellInstArray(cross_cell.cell_index(), pya.DCplxTrans(1, 0, False, 45, 2 * i * length + first_stripes_width - CrossTest.cross_length*5/2))) # vertical cell_vertical.insert(pya.DCellInstArray(stripes_cell.cell_index(), pya.DCplxTrans(1, 90, False, 2 * i * length + length + first_stripes_width, 0))) cell_vertical.insert(pya.DCellInstArray(cross_cell.cell_index(), pya.DCplxTrans(1, 90, True, 2 * i * length + length + first_stripes_width - length - CrossTest.cross_length*5/2, +45))) # diagonal diag_offset = 0 # 2*num_stripes*width/numpy.sqrt(8) cell_diagonal.insert(pya.DCellInstArray(stripes_cell.cell_index(), pya.DCplxTrans(1, -45, False, 500 + i * length - diag_offset, 500 + i * length + diag_offset))) return cell_horizontal, cell_vertical, cell_diagonal